STRUCTURE AND PROPERTIES OF RF SPUTTERED, SUPERCONDUCTING TANTALUM FILMS

被引：18

作者：

SCHREY, F

MATHIS, RD

PAYNE, RT

MURR, LE

机构：

来源：

THIN SOLID FILMS | 1970年 / 5卷 / 01期

关键词：

D O I：

10.1016/0040-6090(70)90048-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：29 / &

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[8] IONIC CONDUCTIVITY DIELECTRIC CONSTANT AND OPTICAL PROPERTIES OF ANODIC OXIDE FILMS ON 2 TYPES OF SPUTTERED TANTALUM FILMS
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[9] PAYNE RL, TO BE PUBLISHED
[10] SCHREY F, 1969, THESIS U SOUTHERN CA