FAST CALCULATION OF COLLECTION EFFICIENCY FOR OPTICAL-EMISSION SPECTROSCOPY OF EXTENDED SOURCES

被引：5

作者：

COLGAN, MJ

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 11期

关键词：

D O I：

10.1063/1.1143445

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A simple method for estimating the collection efficiency of a nearly ideal optical system is described. Calculation of spatial response functions for the analysis and absolute calibration of optical emission data is emphasized. The simple geometric algorithm presented is several orders of magnitude faster than algorithms based on ray tracing. The method is applied to the case of a radially uniform cylindrical source between parallel plates and the results are in excellent agreement with ray tracing calculations.

引用

页码：5311 / 5314

页数：4

共 5 条

[1]

Chapman B., 1980, GLOW DISCHARGE PROCE

[2] TIME-RESOLVED AND SPACE-RESOLVED ELECTRON-IMPACT EXCITATION RATES IN AN RF GLOW-DISCHARGE [J].