TIME-RESOLVED AND SPACE-RESOLVED ELECTRON-IMPACT EXCITATION RATES IN AN RF GLOW-DISCHARGE

被引：10

作者：

COLGAN, MJ

KWON, N

LI, Y

MURNICK, DE

机构：

[1] Department of Physics, Rutgers University, Newark

来源：

PHYSICAL REVIEW LETTERS | 1991年 / 66卷 / 14期

关键词：

D O I：

10.1103/PhysRevLett.66.1858

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Electron-impact excitation rates in a capacitively coupled 13.6-MHz rf argon discharge were derived from optical emission measurements with high time and space resolution. A propagating excitation wave form is shown to exist at gas pressures as high as 1.0 Torr. The observed features-including temporal broadening of the wave form-are in agreement with recent simulation results, and can explain apparent transitions in electron energy distributions previously reported.

引用

页码：1858 / 1861

页数：4

共 16 条

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