SPIN COATING OF A PMMA CHLOROBENZENE SOLUTION

被引：67

作者：

BORNSIDE, DE ^{[1
]}

MACOSKO, CW ^{[1
]}

SCRIVEN, LE ^{[1
]}

机构：

[1] UNIV MINNESOTA, DEPT CHEM ENGN & MAT SCI, MINNEAPOLIS, MN 55455 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1991年 / 138卷 / 01期

关键词：

D O I：

10.1149/1.2085563

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

[No abstract available]

引用

页码：317 / 320

页数：4

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