PROPERTIES OF CARBON COATING FILMS PRODUCED BY ELECTRON-CYCLOTRON RESONANCE PLASMAS

被引：2

作者：

MINAGAWA, H ^{[1
]}

HINO, T ^{[1
]}

YAMASHINA, T ^{[1
]}

AMEMIYA, H ^{[1
]}

ISHIBE, Y ^{[1
]}

KATO, S ^{[1
]}

OKAZAKI, K ^{[1
]}

OYAMA, H ^{[1
]}

SAKAMOTO, Y ^{[1
]}

YANO, K ^{[1
]}

机构：

[1] RIKEN,WAKO,SAITAMA,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574438

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2293 / 2296

页数：4

共 8 条

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