NANO-MACHINING OF GOLD AND SEMICONDUCTOR SURFACES

被引：13

作者：

PACKARD, WE

LIANG, Y

DAI, N

DOW, JD

NICOLAIDES, R

JAKLEVIC, RC

KAISER, WJ

机构：

[1] UNIV NOTRE DAME,DEPT PHYS,NOTRE DAME,IN 46556

[2] USA,ARMAMENT RES & DEV COMMAND,DOVER,NJ 07801

[3] FORD MOTOR CO,DEARBORN,MI 48121

[4] CALTECH,JET PROP LAB,PASADENA,CA 91109

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1988年 / 152卷

关键词：

D O I：

10.1111/j.1365-2818.1988.tb01442.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：715 / 725

页数：11

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