THEORY OF COLLISIONAL SPUTTERING

[1] ANDERSEN HH, 1981, SPUTTERING PARTICLE, V1, P144

[2] BAY HL, 1987, NUCL INSTRUM METH B, V18, P430

[3] BEHRISCH R, 1981, APPL PHYS, V18, P391

[4] UNIFIED THEORY OF COLLISIONAL SPUTTERING [J]. RADIATION EFFECTS LETTERS, 1984, 85 (02): : 75 - 80

[5] EJECTION PROCESS IN COLLISIONAL SPUTTERING [J]. PHYSICAL REVIEW B, 1986, 33 (07): : 5054 - 5056

[6] FALCONE G, 1987, NUCL INSTRUM METH B, V18, P399

[7] DEPTH OF ORIGIN OF SPUTTERED ATOMS [J]. APPLIED PHYSICS, 1981, 25 (03): : 307 - 310

[8] Falcone G., 1985, Radiation Effects Letters Section, V87, P101, DOI 10.1080/01422448508205240

[9] ENERGY-SPECTRA OF ATOMS SPUTTERED BY KEV LIGHT-ION BOMBARDMENT [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 32 (04): : 201 - 203

[10] FALCONE G, IN PRESS

[1] ANDERSEN HH, 1981, SPUTTERING PARTICLE, V1, P144

[2] BAY HL, 1987, NUCL INSTRUM METH B, V18, P430

[3] BEHRISCH R, 1981, APPL PHYS, V18, P391

[4] UNIFIED THEORY OF COLLISIONAL SPUTTERING [J]. RADIATION EFFECTS LETTERS, 1984, 85 (02): : 75 - 80

[5] EJECTION PROCESS IN COLLISIONAL SPUTTERING [J]. PHYSICAL REVIEW B, 1986, 33 (07): : 5054 - 5056

[6] FALCONE G, 1987, NUCL INSTRUM METH B, V18, P399

[7] DEPTH OF ORIGIN OF SPUTTERED ATOMS [J]. APPLIED PHYSICS, 1981, 25 (03): : 307 - 310

[8] Falcone G., 1985, Radiation Effects Letters Section, V87, P101, DOI 10.1080/01422448508205240

[9] ENERGY-SPECTRA OF ATOMS SPUTTERED BY KEV LIGHT-ION BOMBARDMENT [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 32 (04): : 201 - 203

[10] FALCONE G, IN PRESS