MONOLITHIC 2-DIMENSIONAL SURFACE-EMITTING STRAINED-LAYER INGAAS/ALGAAS AND ALINGAAS/ALGAAS DIODE-LASER ARRAYS WITH OVER 50-PERCENT DIFFERENTIAL QUANTUM EFFICIENCIES

被引:26
作者
GOODHUE, WD
DONNELLY, JP
WANG, CA
LINCOLN, GA
RAUSCHENBACH, K
BAILEY, RJ
JOHNSON, GD
机构
[1] Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
关键词
D O I
10.1063/1.105407
中图分类号
O59 [应用物理学];
学科分类号
摘要
Monolithic two-dimensional surface-emitting arrays of strained-layer InGaAs/AlGaAs and AlInGaAs/AlGaAs diode lasers have been fabricated and operated pulsed with low-threshold current densities and differential quantum efficiencies greater than 50%. The InGaAs/AlGaAs arrays emit at 1.03-mu-m, while the AlInGaAs/AlGaAs arrays emit at 0.815-mu-m. Thus, it should be possible to fabricate monolithic arrays with comparable performance over a wide wavelength range. The individual lasers of the arrays are horizontal folded-cavity devices with two 45-degrees internal reflectors and two top-surface facets. The design is simple to implement using optical pattern-generator masks, optical projection printing, and chlorine ion-beam-assisted etching in key fabrication steps.
引用
收藏
页码:632 / 634
页数:3
相关论文
共 24 条
  • [1] INGAAS/ALGAAS STRAINED SINGLE QUANTUM-WELL DIODE-LASERS WITH EXTREMELY LOW THRESHOLD CURRENT-DENSITY AND HIGH-EFFICIENCY
    CHOI, HK
    WANG, CA
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (04) : 321 - 323
  • [2] DESIGN OF FABRY-PEROT SURFACE-EMITTING LASERS WITH A PERIODIC GAIN STRUCTURE
    CORZINE, SW
    GEELS, RS
    SCOTT, JW
    YAN, RH
    COLDREN, LA
    [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1989, 25 (06) : 1513 - 1524
  • [3] Donnelly J. P., 1990, Lincoln Laboratory Journal, V3, P361
  • [4] HYBRID APPROACH TO TWO-DIMENSIONAL SURFACE-EMITTING DIODE-LASER ARRAYS
    DONNELLY, JP
    BAILEY, RJ
    WANG, CA
    SIMPSON, GA
    RAUSCHENBACH, K
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (11) : 938 - 940
  • [5] MONOLITHIC TWO-DIMENSIONAL SURFACE-EMITTING ARRAYS OF GAAS/ALGAAS DIODE-LASERS
    DONNELLY, JP
    GOODHUE, WD
    WINDHORN, TH
    BAILEY, RJ
    LAMBERT, SA
    [J]. APPLIED PHYSICS LETTERS, 1987, 51 (15) : 1138 - 1140
  • [6] COHERENT, MONOLITHIC TWO-DIMENSIONAL (10X10) LASER ARRAYS USING GRATING SURFACE EMISSION
    EVANS, GA
    CARLSON, NW
    HAMMER, JM
    LURIE, M
    BUTLER, JK
    PALFREY, SL
    AMANTEA, R
    CARR, LA
    HAWRYLO, FZ
    JAMES, EA
    KAISER, CJ
    KIRK, JB
    REICHERT, WF
    CHINN, SR
    SHEALY, JR
    ZORY, PS
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (22) : 2123 - 2125
  • [7] MONOLITHIC 2-DIMENSIONAL GAAS ALGAAS LASER ARRAYS FABRICATED BY CHLORINE ION-BEAM-ASSISTED MICROMACHINING
    GOODHUE, WD
    RAUSCHENBACH, K
    WANG, CA
    DONNELLY, JP
    BAILEY, RJ
    JOHNSON, GD
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (05) : 463 - 469
  • [8] GOODHUE WD, 1987, P C GAAS RELATED COM, P349
  • [9] SURFACE-EMITTING GAAS/ALGAAS LASERS WITH DRY-ETCHED 45-DEGREES TOTAL REFLECTION MIRRORS
    HAMAO, N
    SUGIMOTO, M
    TAKADO, N
    TASHIRO, Y
    IWATA, H
    YUASA, T
    ASAKAWA, K
    [J]. APPLIED PHYSICS LETTERS, 1989, 54 (24) : 2389 - 2391
  • [10] SURFACE EMITTING SEMICONDUCTOR-LASERS
    IGA, K
    KOYAMA, F
    KINOSHITA, S
    [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1988, 24 (09) : 1845 - 1855