SORBED WATER AND INTRINSIC STRESS IN COMPOSITE TIO2-SIO2 FILMS

被引：47

作者：

SANKUR, H

GUNNING, W

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：807 / 812

页数：6

共 22 条

[1] EFFECTS OF STRUCTURE, COMPOSITION, AND STRESS ON LASER DAMAGE THRESHOLD OF HOMOGENEOUS AND INHOMOGENEOUS SINGLE FILMS AND MULTILAYERS [J].

AUSTIN, RR ;

MICHAUD, R ;

GUENTHER, AH ;

PUTMAN, J .

APPLIED OPTICS, 1973, 12 (04) :665-676

[2] OPTICAL-PROPERTIES OF SIO2-TIO2 COMPOSITE FILMS [J].

DEMIRYONT, H .

APPLIED OPTICS, 1985, 24 (16) :2647-2650

[3] THE CRACKING AND DECOHESION OF THIN-FILMS [J].

EVANS, AG ;

DRORY, MD ;

HU, MS .

JOURNAL OF MATERIALS RESEARCH, 1988, 3 (05) :1043-1049

[4]

FARNBOROUH EN, 1983, J VAC SCI TECHNOL A, V1, P356

[5]

FRITZGIBBONS ET, 1972, J ELECTROCHEM SOC, V119, P735

[6]

FUGIWARA S, 1317, J OPT SOC AM, V53, P880

[7] MICROSTRUCTURE OF VAPOR-DEPOSITED OPTICAL COATINGS [J].

GUENTHER, KH .

APPLIED OPTICS, 1984, 23 (21) :3806-3816

[8]

GUNNING W, 1988, P SOC PHOTOOPT INSTR, V1019, P204

[9] STRESS IN POROUS THIN-FILMS THROUGH ADSORPTION OF POLAR-MOLECULES [J].

HIRSCH, EH .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (11) :2081-2094

[10] ION-BASED METHODS FOR OPTICAL THIN-FILM DEPOSITION [J].

MARTIN, PJ .

JOURNAL OF MATERIALS SCIENCE, 1986, 21 (01) :1-25

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