SORBED WATER AND INTRINSIC STRESS IN COMPOSITE TIO2-SIO2 FILMS

被引：47

作者：

SANKUR, H

GUNNING, W

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：807 / 812

页数：6

共 22 条

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