ION-BASED METHODS FOR OPTICAL THIN-FILM DEPOSITION

被引：295

作者：

MARTIN, PJ

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1986年 / 21卷 / 01期

关键词：

D O I：

10.1007/BF01144693

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / 25

页数：25

共 148 条

[1] OPTICAL-WAVEGUIDE CHARACTERISTICS OF REACTIVE DC-SPUTTERED NIOBIUM PENTOXIDE FILMS [J].

AAGARD, RL .

APPLIED PHYSICS LETTERS, 1975, 27 (11) :605-607

[2] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].

AISENBERG, S ;

CHABOT, R .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+

[3]

ALLEN TH, 1983, 1983 P INT ION ENG C, P1305

[4]

ALLEN TH, 1982, 1982 P SOC PHOT INST, P93

[5]

ANDERSEN HH, 1980, SPUTTERING ION BOMBA, P145

[6] EFFECT OF ION IRRADIATION ON FORMATION, STRUCTURE AND PROPERTIES OF THIN METAL-FILMS [J].

BABAEV, VO ;

BYKOV, JV ;

GUSEVA, MB .

THIN SOLID FILMS, 1976, 38 (01) :1-8

[7] ION-BEAM SPUTTER-DEPOSITED DIAMOND-LIKE FILMS [J].

BANKS, BA ;

RUTLEDGE, SK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :807-814

[8] INVESTIGATION OF LIGHT-ION SPUTTERING OF TITANIUM USING LASER-INDUCED FLUORESCENCE [J].

BAY, HL ;

SCHWEER, B ;

BOGEN, P ;

HINTZ, E .

JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :732-737

[9]

BEHRISCH R, 1983, TOPICS APPLIED PHYSI, V52

[10]

BINH L, 1984, COMMUNICATION

← 1 2 3 4 5 6 7 8 9 10 →