ELECTRON-MICROSCOPE STUDY OF ELECTRICALLY ACTIVE IMPURITY PRECIPITATE DEFECTS IN SILICON

被引：67

作者：

CULLIS, AG

KATZ, LE

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

[2] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

PHILOSOPHICAL MAGAZINE | 1974年 / 30卷 / 06期

关键词：

D O I：

10.1080/14786437408207290

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1419 / 1443

页数：25

共 56 条

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