PHOTOTHERMAL WAVE IMAGING OF METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR STRUCTURES

被引：36

作者：

MANDELIS, A

WILLIAMS, A

SIU, EKM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.340468

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：92 / 98

页数：7

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