EXPERIMENTAL-STUDY OF FIELD-EMISSION PROPERTIES OF THE SPINDT-TYPE FIELD EMITTER

被引:45
作者
ITOH, S
WATANABE, T
OHTSU, K
TANIGUCHI, M
UZAWA, S
NISHIMURA, N
机构
[1] Futaba Corp, Chiba
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 02期
关键词
D O I
10.1116/1.588339
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article reports experiments conducted to review several factors closely related to emission quality required for flat panel displays. Using the measurement of the emission of fabricated Spindt-type emitters, the dependence of current density on the distance from the tip of an emitter cone to the upper surface of the gate was investigated. It was also confirmed that the shape of the emitter cone was largely affected by the gate hole diameter and material of cone. The maximum half-angle of emission on anode from a tip was compared between the simulated electron beam spread and actual measurements made for emitter arrays.
引用
收藏
页码:487 / 490
页数:4
相关论文
共 10 条
  • [1] SIMULATION OF GEOMETRICAL CHANGE EFFECTS ON ELECTRICAL CHARACTERISTICS OF MICROMETER-SIZE VACUUM TRIODE WITH FIELD EMITTERS
    ASANO, T
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (10) : 2392 - 2394
  • [2] Gray H. F., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P776
  • [3] HIGH-RESOLUTION SIMULATION OF FIELD-EMISSION
    HERRMANNSFELDT, WB
    BECKER, R
    BRODIE, I
    ROSENGREEN, A
    SPINDT, CA
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 298 (1-3) : 39 - 44
  • [4] SIMULATIONS OF FABRICATED FIELD EMITTER STRUCTURES
    HONG, D
    ASLAM, M
    FELDMANN, M
    OLINGER, M
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 764 - 769
  • [5] INVESTIGATION OF CATHODOLUMINESCENT DISPLAY DEVICE WITH FIELD-EMISSION CATHODES
    ITOH, S
    WATANABE, T
    OHTSU, K
    YOKOYAMA, M
    TANIGUCHI, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9A): : 3955 - 3961
  • [6] INFLUENCES OF GASES ON THE FIELD-EMISSION
    ITOH, S
    NIIYAMA, T
    YOKOYAMA, M
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (03): : 647 - 650
  • [7] ITOH S, 1991, UNPUB 4TH INT VAC MI, P58
  • [8] MODELING AND FABRICATING MICRO-CAVITY INTEGRATED VACUUM TUBES
    ORVIS, WJ
    MCCONAGHY, CF
    CIARLO, DR
    YEE, JH
    HEE, EW
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (11) : 2651 - 2658
  • [9] STABILITY OF THE EMISSION OF A MICROTIP
    PY, C
    BAPTIST, R
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 685 - 688
  • [10] PHYSICAL-PROPERTIES OF THIN-FILM FIELD-EMISSION CATHODES WITH MOLYBDENUM CONES
    SPINDT, CA
    BRODIE, I
    HUMPHREY, L
    WESTERBERG, ER
    [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5248 - 5263