GROWTH AND CHARACTERIZATION OF GALLIUM(III) OXIDE-FILMS

被引:28
作者
WU, P
GAO, YM
KERSHAW, R
DWIGHT, K
WOLD, A
机构
[1] Department of Chemistry, Brown University Providence
基金
美国国家科学基金会;
关键词
D O I
10.1016/0025-5408(90)90108-E
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A simple spray pyrolysis technique has been applied to the formation of dense, homogeneous gallium(III) oxide thin films on both silicon and silica substrates. The high quality of these films has been established by transmission electron microscopy, x-ray diffraction, optical spectra, and current-voltage measurements. © 1990.
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页码:357 / 363
页数:7
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