THERMAL-STABILITY OF GAN INVESTIGATED BY LOW-TEMPERATURE PHOTOLUMINESCENCE SPECTROSCOPY

被引:55
作者
LIN, ME [1 ]
SVERDLOV, BN [1 ]
MORKOC, H [1 ]
机构
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
关键词
D O I
10.1063/1.110069
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have studied the thermal behavior of 1-mum-thick GaN films grown by plasma-enhanced molecular beam epitaxy. Samples were annealed at elevated temperatures in a nitrogen environment and were characterized by low-temperature photoluminescence (PL). After GaN samples were annealed at up to 700-degrees-C, the free-exciton transition PL line intensity improved. This PL line intensity degraded when annealing temperatures reached 900-degrees-C. After annealing at 900-degrees-C, GaN samples with inferior crystalline quality exhibited a line at 2.3 eV attributed to point defects and antisite defects.
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页码:3625 / 3627
页数:3
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