NEW METHOD FOR CALCULATING THE MOLECULAR FLUX FROM AN INCLINED KNUDSEN CELL

被引：3

作者：

FUJIWARA, A

机构：

[1] Production Engineering Research Laboratory, Hitachi Ltd, Totsuka-ku, Yokohama

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 04期

关键词：

D O I：

10.1116/1.576544

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A new theoretical treatment of an inclined Knudsen cell in the molecular-beam epitaxy (MBE) system is presented. Clausing's integral equation method is generalized to obtain numerically the angular distribution, transmission probability, and film thickness distribution for the inclined cell. This treatment, which greatly reduces the calculation time as compared with conventional methods, provides optimization of the MBE system design. © 1990, American Vacuum Society. All rights reserved.

引用

页码：3327 / 3332

页数：6

共 6 条

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