GROWTH AND PROPERTIES OF IN-DOPED AND AS-DOPED HGCDTE BY MBE

被引:28
作者
WU, OK
JAMBA, DN
KAMATH, GS
机构
[1] Hughes Research Laboratory, Malibu, CA 90265
关键词
D O I
10.1016/0022-0248(93)90640-I
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Electrical doping of II-VI compound semiconductors is a major issue in MBE growth, especially the p-type doping. In this paper, we will report on the molecular beam epitaxial growth and properties of In- (n-type) and As- (p-type) doped HgCdTe alloys. Unlike the CdTe/HgTe modulation doped approach, we have successfully developed a technique to dope HgCdTe with cadmium arsenide compound directly during the alloy growth, Electrical, optical, structural and chemical properties of these doped HgCdTe layers have been determined by a variety of techniques. The results indicate that these properties vary strongly with crystal orientations. The (211)B phase is a preferred orientation for the MBE growth. The success to control both n- and p-type doping using In and As, respectively, has led to the growth of double layer heterojunction structures for focal plane array applications.
引用
收藏
页码:365 / 370
页数:6
相关论文
共 11 条
[1]   P-TYPE ARSENIC DOPING OF CDTE AND HGTE/CDTE SUPERLATTICES GROWN BY PHOTOASSISTED AND CONVENTIONAL MOLECULAR-BEAM EPITAXY [J].
ARIAS, JM ;
SHIN, SH ;
COOPER, DE ;
ZANDIAN, M ;
PASKO, JG ;
GERTNER, ER ;
DEWAMES, RE ;
SINGH, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02) :1025-1033
[2]  
BAKER IM, 1984, P SOC PHOTO-OPT INS, V50, P121
[3]   THE DOPING OF MERCURY CADMIUM TELLURIDE GROWN BY MOLECULAR-BEAM EPITAXY [J].
BOUKERCHE, M ;
WIJEWARNASURIYA, PS ;
SIVANANTHAN, S ;
SOU, IK ;
KIM, YJ ;
MAHAVADI, KK ;
FAURIE, JP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2830-2833
[4]   INDIUM DOPING OF N-TYPE HGCDTE LAYERS GROWN BY ORGANOMETALLIC VAPOR-PHASE EPITAXY [J].
GHANDHI, SK ;
TASKAR, NR ;
PARAT, KK ;
BHAT, IB .
APPLIED PHYSICS LETTERS, 1990, 57 (03) :252-254
[5]   EXTRINSIC P-TYPE DOPING OF HGCDTE GROWN BY ORGANOMETALLIC EPITAXY [J].
GHANDHI, SK ;
TASKAR, NR ;
PARAT, KK ;
TERRY, D ;
BHAT, IB .
APPLIED PHYSICS LETTERS, 1988, 53 (17) :1641-1643
[6]  
Kamath G., 1991, US Patent, Patent No. [5 028 561, 5028561]
[7]   PROPERTIES OF HGCDTE FILMS AND HG-BASED QUANTUM WELL STRUCTURES GROWN BY PHOTOASSISTED MOLECULAR-BEAM EPITAXY [J].
MYERS, TH ;
YANKA, RW ;
HARRIS, KA ;
REISINGER, AR ;
HAN, J ;
HWANG, S ;
YANG, Z ;
GILES, NC ;
COOK, JW ;
SCHETZINA, JF ;
GREEN, RW ;
MCDEVITT, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02) :300-304
[8]   MODULATION-DOPED HGCDTE QUANTUM-WELL STRUCTURES AND SUPERLATTICES GROWN BY PHOTOASSISTED MOLECULAR-BEAM EPITAXY [J].
SCHETZINA, JF ;
HAN, JW ;
LANSARI, Y ;
GILES, NC ;
YANG, Z ;
HWANG, S ;
COOK, JW ;
OTSUKA, N .
JOURNAL OF CRYSTAL GROWTH, 1990, 101 (1-4) :23-32
[9]  
WU O, 1990, 1990 US WORKSH PHYS, P61
[10]   CHEMICAL DOPING OF HGCDTE BY MOLECULAR-BEAM EPITAXY [J].
WU, OK ;
KAMATH, GS ;
RADFORD, WA ;
BRATT, PR ;
PATTEN, EA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02) :1034-1038