CONTROL OF PINHOLE FORMATION IN EPITAXIAL COSI2 FILMS

被引:10
作者
HUNT, BD
LEWIS, N
HALL, EL
ROBERTSON, CD
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 03期
关键词
D O I
10.1116/1.583782
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:749 / 750
页数:2
相关论文
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