A STUDY ON THE PENETRATION OF PLATINUM INTO SILICON IN TI-PT-AU BEAM LEAD METALLIZATION SYSTEMS

被引：9

作者：

KANAMORI, S

机构：

来源：

THIN SOLID FILMS | 1981年 / 75卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90388-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：19 / 27

页数：9

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