FORMATION OF SILICON OXIDE OVER GOLD LAYERS ON SILICON SUBSTRATES

被引：189

作者：

HIRAKI, A

MAYER, JW

LUGUJJO, E

机构：

来源：

关键词：

D O I：

10.1063/1.1661782

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3643 / &

共 14 条

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[8] LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM
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[9] EFFECT OF CRYSTAL ORIENTATION ON OXIDATION RATES OF SILICON IN HIGH PRESSURE STEAM
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