GROWTH OF PLATINUM SILICIDE UNDER PROTECTIVE LAYERS

被引：18

作者：

JOUBERT, P ^{[1
]}

AUVRAY, P ^{[1
]}

GUIVARCH, A ^{[1
]}

PELOUS, G ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN,PMT CPM,F-22301 LANNION,FRANCE

来源：

APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 11期

关键词：

D O I：

10.1063/1.89527

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：753 / 755

页数：3

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