PLATINUM SILICIDE FORMATION - ELECTRON-SPECTROSCOPY OF PLATINUM-PLATINUM SILICIDE INTERFACE

被引：29

作者：

DANYLUK, S ^{[1
]}

MCGUIRE, GE ^{[1
]}

机构：

[1] TEXAS INSTR INC, POB 5012, DALLAS, TX 75222 USA

来源：

关键词：

D O I：

10.1063/1.1663206

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5141 / 5144

页数：4

共 15 条

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