EFFECT OF OXIDIZING AMBIENTS ON PLATINUM SILICIDE FORMATION .1. ELECTRON-MICROPROBE ANALYSIS

被引：33

作者：

KINGZETT, TJ ^{[1
]}

LADAS, CA ^{[1
]}

机构：

[1] MOTOROLA INC, SEMICOND PROD DIV, MESA, AZ 85201 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1975年 / 122卷 / 12期

关键词：

D O I：

10.1149/1.2134119

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1729 / 1732

页数：4

共 29 条

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[5]

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[8] LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM [J].

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[10]

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