ANALYTICAL STUDY OF PLATINUM SILICIDE FORMATION

[1] ANDERSEN CA, 1969, INT J MASS SPECTROM, V2, P61

[2] BROWN WC, UNPUBLISHED DATA

[3] CHANG CC, 1974, CHARACTERIZATION SOL

[4] COMPARISON OF BACKSCATTERING SPECTROMETRY AND SECONDARY ION MASS-SPECTROMETRY BY ANALYSIS OF TANTALUM PENTOXIDE LAYERS [J]. ANALYTICAL CHEMISTRY, 1974, 46 (14) : 2136 - 2141

[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41

[6] CHU WK, 1974, ION BEAM SURFACE LAY, P423

[7] COLBY JW, 1971, 6TH P NAT C EL PROB

[8] PLATINUM SILICIDE FORMATION - ELECTRON-SPECTROSCOPY OF PLATINUM-PLATINUM SILICIDE INTERFACE [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (12) : 5141 - 5144

[9] INTERACTION OF AL LAYERS WITH POLYCRYSTALLINE SI [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (11) : 4678 - 4684

[10] KINETICS AND MECHANISM OF PLATINUM SILICIDE FORMATION ON SILICON [J]. APPLIED PHYSICS LETTERS, 1974, 24 (08) : 391 - 393

[1] ANDERSEN CA, 1969, INT J MASS SPECTROM, V2, P61

[2] BROWN WC, UNPUBLISHED DATA

[3] CHANG CC, 1974, CHARACTERIZATION SOL

[4] COMPARISON OF BACKSCATTERING SPECTROMETRY AND SECONDARY ION MASS-SPECTROMETRY BY ANALYSIS OF TANTALUM PENTOXIDE LAYERS [J]. ANALYTICAL CHEMISTRY, 1974, 46 (14) : 2136 - 2141

[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41

[6] CHU WK, 1974, ION BEAM SURFACE LAY, P423

[7] COLBY JW, 1971, 6TH P NAT C EL PROB

[8] PLATINUM SILICIDE FORMATION - ELECTRON-SPECTROSCOPY OF PLATINUM-PLATINUM SILICIDE INTERFACE [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (12) : 5141 - 5144

[9] INTERACTION OF AL LAYERS WITH POLYCRYSTALLINE SI [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (11) : 4678 - 4684

[10] KINETICS AND MECHANISM OF PLATINUM SILICIDE FORMATION ON SILICON [J]. APPLIED PHYSICS LETTERS, 1974, 24 (08) : 391 - 393