INTERACTION OF AL LAYERS WITH POLYCRYSTALLINE SI

[1] BELLIER SP, 1973, SEMICONDUCTOR SILICO, P304

[2] DETERMINATION OF CONCENTRATION PROFILE IN THIN METALLIC-FILMS - APPLICATIONS AND LIMITATIONS OF HE+ BACKSCATTERING [J]. THIN SOLID FILMS, 1975, 25 (02) : 431 - 440

[3] MEASUREMENT OF SOLUBILITY OF GERMANIUM IN ALUMINUM UTILIZING MEV HE+ BACKSCATTERING [J]. METALLURGICAL TRANSACTIONS, 1973, 4 (03): : 735 - 743

[4] CHANG CC, 1974, CHARACTERIZATION SOL

[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41

[6] CZEPREGI L, COMMUNICATION

[7] Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[8] HERD SR, 1972, J NONCRYSTAL SOLIDS, V7, P309, DOI DOI 10.1016/0022-3093(72)90267-0

[9] EVALUATION OF GLANCING ANGLE X-RAY-DIFFRACTION AND MEV HE-4 BACKSCATTERING ANALYSES OF SILICIDE FORMATION [J]. THIN SOLID FILMS, 1974, 23 (02) : 205 - 213

[10] DIFFUSIVITY AND SOLUBILITY OF SI IN AL METALLIZATION OF INTEGRATED CIRCUITS [J]. APPLIED PHYSICS LETTERS, 1971, 19 (12) : 524 - &

[1] BELLIER SP, 1973, SEMICONDUCTOR SILICO, P304

[2] DETERMINATION OF CONCENTRATION PROFILE IN THIN METALLIC-FILMS - APPLICATIONS AND LIMITATIONS OF HE+ BACKSCATTERING [J]. THIN SOLID FILMS, 1975, 25 (02) : 431 - 440

[3] MEASUREMENT OF SOLUBILITY OF GERMANIUM IN ALUMINUM UTILIZING MEV HE+ BACKSCATTERING [J]. METALLURGICAL TRANSACTIONS, 1973, 4 (03): : 735 - 743

[4] CHANG CC, 1974, CHARACTERIZATION SOL

[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41

[6] CZEPREGI L, COMMUNICATION

[7] Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[8] HERD SR, 1972, J NONCRYSTAL SOLIDS, V7, P309, DOI DOI 10.1016/0022-3093(72)90267-0

[9] EVALUATION OF GLANCING ANGLE X-RAY-DIFFRACTION AND MEV HE-4 BACKSCATTERING ANALYSES OF SILICIDE FORMATION [J]. THIN SOLID FILMS, 1974, 23 (02) : 205 - 213

[10] DIFFUSIVITY AND SOLUBILITY OF SI IN AL METALLIZATION OF INTEGRATED CIRCUITS [J]. APPLIED PHYSICS LETTERS, 1971, 19 (12) : 524 - &