CRYSTALLINE STRUCTURE OF GERMANIUM FILMS ON SILICON SUBSTRATES .2. METALLOGRAPHICAL STUDIES OF GE ON SI HETEROEPITAXIAL FILM STRUCTURE

被引：14

作者：

VASILEVSKAYA, VN

SOLDATENKO, NN

TKHORIK, YA

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(71)90031-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：127 / +

页数：1

共 13 条

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[3] CRYSTALLINE STRUCTURE OF GERMANIUM FILMS ON SILICON SUBSTRATES .1. INVESTIGATION OF PERFECTION OF GERMANIUM HETEROEPITAXIAL FILMS ON SILICON BY X-RAY DIFFRACTION METHODS
DATSENKO, LI
GUREEV, AN
KOROTKEVICH, NF
SOLDATENKO, NN
TKHORIK, YA
[J]. THIN SOLID FILMS, 1971, 7 (02) : 117 - +
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[5] DEFORMATION OF AND STRESS IN EPITAXIAL SILICON FILMS ON SINGLE-CRYSTAL SAPPHIRE
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[J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (09) : 2700 - &
[6] HOFFMAN RW, 1966, PHYSICS THIN FILMS, V3
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[8] Klimenko A. P., 1970, Ukrayins'kyi Fizychnyi Zhurnal, V15, P804
[9] KOHN JA, 1969, SB DEFEKTY KRISTALLA
[10] MAGOMEDOV XA, 1965, IZV AKAD NAUK SSR NM, V1, P2120