INTERFERENCE METHOD FOR MEASUREMENT OF THICKNESS VARIATIONS IN THIN LIQUID-FILMS

被引:6
作者
FISHER, LR [1 ]
PARKER, NS [1 ]
SHARPLES, F [1 ]
机构
[1] CSIRO, DIV APPL PHYS, SYDNEY, NSW 2070, AUSTRALIA
关键词
Compendex;
D O I
10.1117/12.7972613
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
INTERFEROMETRY
引用
收藏
页码:798 / 800
页数:3
相关论文
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