INTERFACIAL REACTIONS BETWEEN ALUMINUM AND TRANSITION-METAL NITRIDE AND CARBIDE FILMS

被引：113

作者：

WITTMER, M ^{[1
]}

机构：

[1] SWISS FED INST TECHNOL,CH-8092 ZURICH,SWITZERLAND

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 02期

关键词：

D O I：

10.1063/1.330509

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：1007 / 1012

页数：6

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