X-RAY-LITHOGRAPHY USING A PULSED PLASMA SOURCE

被引：62

作者：

PEARLMAN, JS

RIORDAN, JC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571241

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1190 / 1193

页数：4

共 15 条

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