OPTICAL SELF-REGULATION DURING LASER-INDUCED OXIDATION OF COPPER

被引：40

作者：

BAUFAY, L ^{[1
]}

HOULE, FA ^{[1
]}

WILSON, RJ ^{[1
]}

机构：

[1] IBM CORP, ALMADEN RES CTR, 650 HARRY RD, SAN JOSE, CA 95120 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 09期

关键词：

D O I：

10.1063/1.338375

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4640 / 4651

页数：12

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