GAS SENSORS FOR HIGH-TEMPERATURE OPERATION BASED ON METAL-OXIDE-SILICON CARBIDE (MOSIC) DEVICES

被引：103

作者：

ARBAB, A

SPETZ, A

LUNDSTROM, I

机构：

[1] Laboratory of Applied Physics, University of Linköping

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1993年 / 15卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(93)85022-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Catalytic metal gate-silicon dioxide-silicon carbide (MOSiC) capacitors operating to about 800-degrees-C are used as high temperature gas sensor devices. Hydrogen or hydrogen containing molecules, which are dissociated on the catalytic metal surface, create a decrease of the flat band voltage of the MOS capacitor. The MOSiC devices with a platinum gate respond to saturated hydrocarbons in air at concentrations well below the explosion limits.

引用

页码：19 / 23

页数：5

共 17 条

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