FORMATION OF SILICON-NITRIDE STRUCTURES BY DIRECT ELECTRON-BEAM WRITING

被引：22

作者：

CHIN, BH ^{[1
]}

EHRLICH, G ^{[1
]}

机构：

[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 04期

关键词：

D O I：

10.1063/1.92334

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：253 / 255

页数：3

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