IDENTIFICATION OF PLASMA-SHEATH RESONANCES IN A PARALLEL-PLATE PLASMA REACTOR

被引：57

作者：

ANNARATONE, BM

KU, VPT

ALLEN, JE

机构：

[1] Department of Engineering Science, University of Oxford, Oxford OX1 3PJ, Parks Road

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 77卷 / 10期

关键词：

D O I：

10.1063/1.359242

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new, unexpected resonance has been observed in radio frequency, parallel plate plasma reactors. It has been explained using a linear model by analogy with the series resonance of probes. This discovery may be used in different ways; as a diagnostic, to measure the plasma density with high accuracy and, possibly, in improving the plasma performance in the low-pressure range. © 1995 American Institute of Physics.

引用

页码：5455 / 5457

页数：3

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