GAS INCORPORATION INTO SPUTTERED FILMS

被引：241

作者：

WINTERS, HF

KAY, E

机构：

来源：

关键词：

D O I：

10.1063/1.1709043

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3928 / &

共 27 条

[11] ION TRAPPING AND GAS RELEASE PHENOMENA [J].

GRANT, WA ;

CARTER, G .

[12]

GULDNER WG, 1964, IEEE T COMPONENT PAR, VCP11

HOBSON, JP ;

ARMSTRONG, RA .

[14]

KAMINSKY M, 1965, ATOMIC IONIC IMPACT, P292

[15]

KAY E, 1967, 3 T INT VAC C 2, V2, P351

[16] DIFFUSION IN INERT-GAS BOMBARDED PT AND AL [J].

KELLY, R ;

RUEDL, E .

PHYSICA STATUS SOLIDI, 1966, 13 (01) :55-&

KORNELSEN, EV .

[18] THIN FILMS DEPOSITED BY BIAS SPUTTERING [J].

MAISSEL, LI ;

SCHAIBLE, PM .

[19] INFLUENCE OF ADSORBED GAS ON SURFACE DIFFUSION AND NUCLEATION [J].

MELMED, AJ .

[20]

PAMIN BV, 1962, SOVIET PHYSJETP, V15, P215