ION-BOMBARDMENT-ENHANCED DIFFUSION DURING GROWTH OF SPUTTERED SUPER-LATTICE THIN-FILMS

被引：31

作者：

ELTOUKHY, AH

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801

[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 04期

关键词：

D O I：

10.1063/1.90330

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：343 / 345

页数：3

共 14 条

[1]

[Anonymous], 1963, KGL DANSKE VIDENSKAB

[2] PLASMA DIAGNOSTICS AND ENERGY TRANSPORT OF A DC DISCHARGE USED FOR SPUTTERING [J].

BALL, DJ .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (07) :3047-&

[3] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING [J].

COBURN, JW ;

KAY, E .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :4965-4971

[4] A MODEL FOR DIFFUSION ON CUBIC LATTICES AND ITS APPLICATION TO EARLY STAGES OF ORDERING [J].

COOK, HE ;

DEFONTAI.D ;

HILLIARD, JE .

ACTA METALLURGICA, 1969, 17 (06) :765-+

[5] INFLUENCE OF STATIC ATOMIC DISPLACEMENTS ON DIFFUSE INTENSITY SCATTERED BY SOLID SOLUTIONS [J].

COOK, HE .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1969, 30 (05) :1097-&

[6] INTERLAYER DIFFUSION IN INSB-GASB SUPERLATTICE STRUCTURE GROWN BY MULTITARGET RF SPUTTERING [J].

ELTOUKHY, AH ;

ZILKO, JL ;

WICKERSHAM, CE ;

GREENE, JE .

APPLIED PHYSICS LETTERS, 1977, 31 (03) :156-158

[7]

ELTOUKHY AH, UNPUBLISHED

[8]

FONTAINE DD, 1967, LOCAL ARRANGEMENTS S, pCH2

[9] GROWTH OF IN1-XGAXSB AND IN1-XALXSB FILMS BY MULTI-TARGET RF SPUTTERING [J].

GREENE, JE ;

WICKERSHAM, CE ;

ZILKO, JL .

THIN SOLID FILMS, 1976, 32 (01) :51-54

[10]

GREENE JE, 1976, J APPL PHYS, V47, P4734

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