NOVEL EFFECTS OF MAGNETIC-FIELD ON THE SILANE GLOW-DISCHARGE

被引：60

作者：

TANIGUCHI, M ^{[1
]}

HIROSE, M ^{[1
]}

HAMASAKI, T ^{[1
]}

OSAKA, Y ^{[1
]}

机构：

[1] HIROSHIMA UNIV,DEPT ELECT ENGN,HIROSHIMA 730,JAPAN

来源：

关键词：

D O I：

10.1063/1.92074

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：787 / 788

页数：2

共 7 条

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[4]

HAMASAKI T, 1980, 4TH P S ISAT 80 TOK

[5]

KAMPAS FJ, 1980, P PHOTOVOLTAIC MATER

[6]

LEHNERT B, 1958, 2ND P INT C PEAC US, P32

[7] PLASMA SPECTROSCOPY - CONTROL AND ANALYSIS OF A-SI-H DEPOSITION [J].

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