A BATCH-FABRICATED NON-REVERSE VALVE WITH CANTILEVER BEAM MANUFACTURED BY MICROMACHINING OF SILICON

被引：40

作者：

TIREN, J

TENERZ, L

HOK, B

机构：

来源：

SENSORS AND ACTUATORS | 1989年 / 18卷 / 3-4期

关键词：

D O I：

10.1016/0250-6874(89)87044-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：389 / 396

页数：8

共 13 条

[1]

CSEPREGI L, 1984, T84209 FRAUNH I FEST

[2]

DENHARTOG JP, 1934, MECH VIBRATIONS, P172

[3]

ESASHI M, 1987, 4 INT C SOL STAT SEN, P830

[4]

ESASHI M, 1985, IVA309 RAPP

[5] BIAS-DEPENDENT ETCHING OF SILICON IN AQUEOUS KOH [J].

GLEMBOCKI, OJ ;

STAHLBUSH, RE ;

TOMKIEWICZ, M .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (01) :145-151

[6] VIBRATION ANALYSIS OF MICROMECHANICAL ELEMENTS [J].

HOK, B ;

GUSTAFSSON, K .

SENSORS AND ACTUATORS, 1985, 8 (03) :235-243

[7] FRACTURE TESTING OF SILICON MICROELEMENTS INSITU IN A SCANNING ELECTRON-MICROSCOPE [J].

JOHANSSON, S ;

SCHWEITZ, JA ;

TENERZ, L ;

TIREN, J .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) :4799-4803

[8] FABRICATION OF 3-DIMENSIONAL SILICON STRUCTURES BY MEANS OF DOPING-SELECTIVE ETCHING (DSE) [J].

LINDEN, Y ;

TENERZ, L ;

TIREN, J ;

HOK, B .

SENSORS AND ACTUATORS, 1989, 16 (1-2) :67-82

[9] SILICON AS A MECHANICAL MATERIAL [J].

PETERSEN, KE .

PROCEEDINGS OF THE IEEE, 1982, 70 (05) :420-457

[10]

ROARK R, 1954, FORMULAS STRESS STRA, P100

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