CHARACTERIZATION OF ELECTRON TRAPS IN SIO2 AS INFLUENCED BY PROCESSING PARAMETERS

被引:40
作者
YOUNG, DR
机构
关键词
D O I
10.1063/1.329259
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4090 / 4094
页数:5
相关论文
共 13 条
[1]   AVALANCHE INJECTION OF HOLES INTO SIO2 [J].
AITKEN, JM ;
YOUNG, DR .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1977, 24 (06) :2128-2134
[2]  
DEAL BE, 1974, J ELECTROCHEM SOC, V121, P1980
[3]   CAPTURE OF ELECTRONS INTO NA+-RELATED TRAPPING SITES IN SIO2 LAYER OF MOS STRUCTURES AT 77 DEGREESK [J].
DIMARIA, DJ ;
AITKEN, JM ;
YOUNG, DR .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) :2740-2743
[4]  
FOWKES FM, 1979, INTERFACE SPECIALIST
[5]   EFFECTS OF PROCESSING ON HOT-ELECTRON TRAPPING IN SIO2 [J].
GDULA, RA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (01) :42-47
[6]   ANNEALING OF SURFACE-STATES IN POLYCRYSTALLINE-SILICON-GATE CAPACITORS [J].
HICKMOTT, TW .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (02) :723-733
[7]   EFFECTS OF TRACE AMOUNTS OF WATER ON THERMAL OXIDATION OF SILICON IN OXYGEN [J].
IRENE, EA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (12) :1613-1616
[8]   ELECTROCHEMICAL CHARGING OF THERMAL SIO2 FILMS BY INJECTED ELECTRON CURRENTS [J].
NICOLLIA.EH ;
BERGLUND, CN ;
SCHMIDT, PF ;
ANDREWS, JM .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) :5654-&
[9]   AVALANCHE INJECTION CURRENTS AND CHARGING PHENOMENA IN THERMAL SIO2 [J].
NICOLLIAN, EH ;
GOETZBERGER, A ;
BERGLUND, CN .
APPLIED PHYSICS LETTERS, 1969, 15 (06) :174-+
[10]   AVALANCHE INJECTION EFFECTS IN MIS STRUCTURES AND REALIZATION OF N-CHANNEL ENHANCEMENT TYPE-MOS-FETS [J].
USHIROKAWA, A ;
SUZUKI, E ;
WARASHIN.M .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1973, 12 (03) :398-407