DETECTION OF DRY ETCHING PRODUCT SPECIES WITH INSITU FOURIER-TRANSFORM INFRARED-SPECTROSCOPY

被引：26

作者：

CLELAND, TA ^{[1
]}

HESS, DW ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 01期

关键词：

D O I：

10.1116/1.584442

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：35 / 40

页数：6

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