SYNTHESIS AND CHARACTERIZATION OF TIO2 THIN-FILMS ON ORGANIC SELF-ASSEMBLED MONOLAYERS .1. FILM FORMATION FROM AQUEOUS-SOLUTIONS

被引：157

作者：

SHIN, H ^{[1
]}

COLLINS, RJ ^{[1
]}

DEGUIRE, MR ^{[1
]}

HEUER, AH ^{[1
]}

SUKENIK, CN ^{[1
]}

机构：

[1] CASE WESTERN RESERVE UNIV,DEPT CHEM,CLEVELAND,OH 44106

来源：

JOURNAL OF MATERIALS RESEARCH | 1995年 / 10卷 / 03期

关键词：

D O I：

10.1557/JMR.1995.0692

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Self-assembled monolayers (SAMs) bearing sulfonate (-SO3H) surface functional groups, on single-crystal Si wafers, were used as substrates for the deposition of TiO2 thin films from aqueous solutions. Polycrystalline TiO2 thin films over 50 nm thick formed in 2 h by hydrolysis of TiCl4 in aqueous HCl solutions at 80 degrees C, The films were pore-free, showed excellent adherence and uniformity, and consisted of anatase crystallites 2-4 nm in diameter. Annealing at temperatures up to 600 degrees C caused coarsening of the anatase grains, but no loss of adherence or structural integrity.

引用

页码：692 / 698

页数：7

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[1] MOISTURE ABSORPTION CHARACTERISTICS OF ORGANOSILOXANE SELF-ASSEMBLED MONOLAYERS [J].