MEASUREMENT OF ALUMINUM CONCENTRATION IN GAALAS EPITAXIAL LAYERS BY DOUBLE-AXIS X-RAY-DIFFRACTION

被引:12
作者
TANNER, BK
MILES, SJ
PETERSON, GG
SACKS, RN
机构
[1] UNITED TECHNOL RES CTR,E HARTFORD,CT 06108
[2] BEDE SCI INSTRUMENTS,DURHAM DH6 4HE,ENGLAND
关键词
D O I
10.1016/0167-577X(88)90019-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:239 / 241
页数:3
相关论文
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