HIGH-POWER LASER ETCHING AND AUGER-ELECTRON SPECTROSCOPY PROFILES

被引：12

作者：

PAPAGNO, L

SCARMOZZINO, R

SIMONI, F

机构：

来源：

THIN SOLID FILMS | 1980年 / 67卷 / 01期

关键词：

D O I：

10.1016/0040-6090(80)90299-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：157 / 161

页数：5

共 14 条

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[3]

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[8] OXYGEN-ADSORPTION ON STAINLESS-STEEL [J].

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[9]

MEINEL AB, 1976, APPLIED SOLAR ENERGY, P286

[10] SPUTTERING YIELDS OF THIN OVERLAYER FILMS BY ATTENUATION OF THE SUBSTRATE AUGER-ELECTRON SIGNAL [J].

PAPAGNO, L ;

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MEUTI, M .

THIN SOLID FILMS, 1979, 60 (03) :307-312

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