INFLUENCE OF OXIDE LAYERS ON DETERMINATION OF OPTICAL PROPERTIES OF SILICON

被引：125

作者：

PHILIPP, HR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 06期

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D O I：

10.1063/1.1661603

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2835 / &

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共 23 条

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY
ARCHER, RJ
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &
[2] REFLECTANCE-INCREASING COATINGS FOR THE VACUUM ULTRAVIOLET AND THEIR APPLICATIONS
BERNING, PH
HAAS, G
MADDEN, RP
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1960, 50 (06) : 586 - 597
[3] OPTICAL PROPERTIES + BAND STRUCTURE OF GROUP 4-6 + GROUP 5 MATERIALS
CARDONA, M
GREENAWAY, DL
[J]. PHYSICAL REVIEW, 1964, 133 (6A): : 1685 - +
[4] CULLEN GW, 1970, RCA REV, V31, P355
[5] INTRINSIC OPTICAL ABSORPTION IN SINGLE-CRYSTAL GERMANIUM AND SILICON AT 77-DEGREES-K AND 300-DEGREES-K
DASH, WC
NEWMAN, R
[J]. PHYSICAL REVIEW, 1955, 99 (04): : 1151 - 1155
[6] ENERGIEANALYSE IM ELEKTRONENSTREUDIAGRAMM EINER DUNNEN SILIZIUM-FOLIE
DIMIGEN, H
[J]. ZEITSCHRIFT FUR PHYSIK, 1961, 165 (01): : 53 - &
[7] GAHWILLER C, 1970, 10 P INT C PHYS SEM, P213
[8] Heavens O. S., 1955, OPTICAL PROPERTIES T
[9] ON VACUUM-ULTRAVIOLET REFELECTANCE OF EVAPORATED ALUMINUM BEFORE AND DURING OXIDATION
MADDEN, RP
HASS, G
CANFIELD, LR
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1963, 53 (05) : 620 - &
[10] OPTICAL PROPERTIES OF GERMANIUM IN FAR ULTRAVIOLET
MARTON, L
TOOTS, J
[J]. PHYSICAL REVIEW, 1967, 160 (03): : 602 - &