DIFFUSION OF GOLD IN SILICON - A NEW MODEL

[11] SILICON SELF-DIFFUSION - (CZOCHRALSKI SINGLE CRYSTAL - SI31 - TEMPERATURE DEPENDENCE - ACTIVATION ENERGY 118.5 KCAL/MOLE - 1100 TO 1300 DEGREES C - E) [J]. APPLIED PHYSICS LETTERS, 1966, 8 (11) : 280 - +

[12] Matano C., 1933, JPN J APPL PHYS, V8, P109

[13] Mayer H. J., 1977, International Conference on Radiation Effects in Semiconductors, P186

[14] SELF DIFFUSION IN INTRINSIC SILICON [J]. PHYSICA STATUS SOLIDI, 1966, 15 (02): : K119 - &

[15] ON THE THEORY OF THE DIFFUSION OF GOLD INTO SILICON [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 61 (02): : 521 - 529

[16] SEEGER A, 1979, I PHYS C SER, V46, P148

[17] SEEGER A, UNPUBLISHED

[18] A NOTE ON THE THEORY OF DIFFUSION OF COPPER IN GERMANIUM [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1959, 73 (470): : 297 - 306

[19] TUCK B, 1974, INTRO DIFFUSION SEMI, P200

[20] GOLD IN SILICON - EFFECT ON RESISTIVITY AND DIFFUSION IN HEAVILY-DOPED LAYERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (12) : 1377 - 1380

[11] SILICON SELF-DIFFUSION - (CZOCHRALSKI SINGLE CRYSTAL - SI31 - TEMPERATURE DEPENDENCE - ACTIVATION ENERGY 118.5 KCAL/MOLE - 1100 TO 1300 DEGREES C - E) [J]. APPLIED PHYSICS LETTERS, 1966, 8 (11) : 280 - +

[12] Matano C., 1933, JPN J APPL PHYS, V8, P109

[13] Mayer H. J., 1977, International Conference on Radiation Effects in Semiconductors, P186

[14] SELF DIFFUSION IN INTRINSIC SILICON [J]. PHYSICA STATUS SOLIDI, 1966, 15 (02): : K119 - &

[15] ON THE THEORY OF THE DIFFUSION OF GOLD INTO SILICON [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 61 (02): : 521 - 529

[16] SEEGER A, 1979, I PHYS C SER, V46, P148

[17] SEEGER A, UNPUBLISHED

[18] A NOTE ON THE THEORY OF DIFFUSION OF COPPER IN GERMANIUM [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1959, 73 (470): : 297 - 306

[19] TUCK B, 1974, INTRO DIFFUSION SEMI, P200

[20] GOLD IN SILICON - EFFECT ON RESISTIVITY AND DIFFUSION IN HEAVILY-DOPED LAYERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (12) : 1377 - 1380