ENHANCED NEARFIELD RESOLUTION OF SMALL PHASE OBJECTS USING A PRIORI KNOWLEDGE

被引:5
作者
KRUMBUGEL, MA
TOTZECK, M
机构
[1] Optisches Institut der Technischen Universität Berlin, W-1000 Berlin 12
关键词
D O I
10.1016/0030-4018(93)90756-U
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Amplitude and phase distributions in the nearfield behind small and weak double-bar phase objects (width and separation < wavelength lambda) measured with electro-magnetic 3 cm waves in TM-polarization (E-vector parallel to the bars) yield a rather poor agreement with the true phase object structure. However, for rectangular cross-sections of the phase object bars a simple expression of the angular spectrum of the diffraction field is available. The calculated amplitude of the angular spectrum is fitted to the angular spectrum of the measured nearfield distributions, with the dimensions (width, thickness, separation) of the phase bars as fitting parameters. The procedure yields an excellent reconstruction of the object sizes. It is not limited to the nearfield, but may be applied to the farfield, too.
引用
收藏
页码:47 / 53
页数:7
相关论文
共 15 条
[1]   SUPER-RESOLUTION APERTURE SCANNING MICROSCOPE [J].
ASH, EA ;
NICHOLLS, G .
NATURE, 1972, 237 (5357) :510-&
[2]   POLARIZATION CONTRAST IN NEAR-FIELD SCANNING OPTICAL MICROSCOPY [J].
BETZIG, E ;
TRAUTMAN, JK ;
WEINER, JS ;
HARRIS, TD ;
WOLFE, R .
APPLIED OPTICS, 1992, 31 (22) :4563-4568
[3]   WIDEBAND MICROWAVE DIFFRACTION TOMOGRAPHY UNDER BORN APPROXIMATION [J].
CHU, TH ;
LEE, KY .
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 1989, 37 (04) :515-519
[4]  
Dandliker R., 1970, Optics Communications, V1, P323, DOI 10.1016/0030-4018(70)90032-5
[5]   SELF-CONSISTENT STUDY OF DYNAMIC AND POLARIZATION EFFECTS IN NEAR-FIELD OPTICAL MICROSCOPY [J].
GIRARD, C ;
BOUJU, X .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1992, 9 (02) :298-305
[6]  
Goodman J, 1996, INTRO FOURIER OPTICS
[7]   DIFFRACTION NEAR FIELDS OF SMALL PHASE OBJECTS - COMPARISON OF 3-CM WAVE MEASUREMENTS WITH MOMENT-METHOD CALCULATIONS [J].
KOPPELMANN, G ;
TOTZECK, M .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1991, 8 (03) :554-558
[8]   LINEWIDTH MEASUREMENT WITH AN OPTICAL MICROSCOPE - EFFECT OF OPERATING-CONDITIONS ON IMAGE PROFILE [J].
NYYSSONEN, D .
APPLIED OPTICS, 1977, 16 (08) :2223-2230
[9]   OPTICAL MICROSCOPE IMAGING OF LINES PATTERNED IN THICK LAYERS WITH VARIABLE EDGE-GEOMETRY - THEORY [J].
NYYSSONEN, D ;
KIRK, CP .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1988, 5 (08) :1270-1280
[10]  
Pohl D.W., 1991, ADV OPT ELECTRON MIC, V12, P243, DOI [10.1016/B978-0-12-029912-6.50009-9, DOI 10.1016/B978-0-12-029912-6.50009-9]