METHOD FOR ESTIMATING ACCURATE DEEP-TRAP DENSITIES FROM DLTS OF JUNCTIONS CONTAINING SEVERAL KINDS OF DEEP-TRAPS

被引：8

作者：

NAKASHIMA, H

HASHIMOTO, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1989年 / 28卷 / 08期

关键词：

D O I：

10.1143/JJAP.28.1402

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1402 / 1406

页数：5

共 11 条

[1]

BOURGOIN J, 1983, POINT DEFECTS SEMICO, V2, P164

[2] DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS [J].

LANG, DV .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) :3023-3032

[3] A NEW METHOD OF ANALYSIS OF DLTS-SPECTRA [J].

LANGFELD, R .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 44 (02) :107-110

[4] MULTIEXPONENTIAL ANALYSIS OF DLTS [J].

MORIMOTO, J ;

KIDA, T ;

MIKI, Y ;

MIYAKAWA, T .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 39 (03) :197-202

[5] CHANGES OF DLTS SPECTRUM WITH GOLD CONCENTRATION AND GOLD-DIFFUSION TEMPERATURE IN N-TYPE SILICON [J].

MOROOKA, M ;

TOMOKAGE, H ;

YOSHIDA, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (09) :1778-1779

[6] METHOD OF ANALYSIS OF A SINGLE-PEAK DLTS SPECTRUM WITH 2 OVERLAPPING DEEP-TRAP RESPONSES [J].

NAKASHIMA, H ;

MIYAGAWA, T ;

SUGITANI, S ;

HASHIMOTO, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (02) :205-208

[7] A MODULATED DLTS METHOD FOR LARGE-SIGNAL ANALYSIS (C2-DLTS) [J].

OKUSHI, H ;

TOKUMARU, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (01) :L45-L47

[8] FREQUENCY DEPENDENCE OF REVERSE-BIASED CAPACITANCE OF GOLD-DOPED SILICON P+N STEP JUNCTIONS [J].

SAH, CT ;

REDDI, VGK .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1964, ED11 (07) :345-+

[9]

Sze S.M., 1981, PHYSICS SEMICONDUCTO, P21

[10] NOTE ON THE ANALYSIS OF DLTS AND C2-DLTS [J].

TOMOKAGE, H ;

NAKASHIMA, H ;

HASHIMOTO, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1982, 21 (01) :67-70

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