ALIGNABLE LIFTOFF TRANSFER OF DEVICE ARRAYS VIA A SINGLE POLYMERIC CARRIER MEMBRANE

被引：7

作者：

CALLAHAN, JJ

MARTIN, KP

DRABIK, TJ

QUIMBY, BB

FAN, C

机构：

[1] GEORGIA INST TECHNOL,CTR MICROELECTR RES,ATLANTA,GA 30332

[2] UNIV CALIF SAN DIEGO,DEPT ELECT & COMP ENGN,LA JOLLA,CA 92093

来源：

ELECTRONICS LETTERS | 1993年 / 29卷 / 11期

关键词：

SEMICONDUCTOR DEVICES AND MATERIALS;

D O I：

10.1049/el:19930634

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The Letter reports epitaxial liftoff and direct bonding of GaAs/AlxGa1-xAs heterostructure device arrays and continuous films, using a single transparent polymer membrane to support the material during etch of the sacrificial layer and to manipulate it into position for bonding. Au-Sn eutectic alloy bonding leads to a metallurgical bond in minutes. Photoluminescence and current voltage characteristics show that material quality is not substantially degraded in the transfer process.

引用

页码：951 / 953

页数：3

共 13 条

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