SMOOTH DIAMOND FILMS GROWN BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION ON POSITIVELY BIASED SILICON SUBSTRATES

被引：18

作者：

POPOVICI, G ^{[1
]}

CHAO, CH ^{[1
]}

PRELAS, MA ^{[1
]}

CHARLSON, EJ ^{[1
]}

MEESE, JM ^{[1
]}

机构：

[1] UNIV MISSOURI,DEPT ELECT ENGN,COLUMBIA,MO 65211

来源：

JOURNAL OF MATERIALS RESEARCH | 1995年 / 10卷 / 08期

关键词：

D O I：

10.1557/JMR.1995.2011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond films have been grown by hot filament chemical vapor deposition (CVD) on mirror-polished positively biased Si substrates. Very smooth films a few micrometers thick were obtained in only 30 min. SEM, x-ray diffraction patterns, and Raman were used to characterize the films. Not only diamond but other carbon phases, were also detected. The initial structure showed a high density of defects and large stresses. Structural changes in time were found to occur with films apparently undergoing a phase transformation.

引用

页码：2011 / 2016

页数：6

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