THE JAERI HIGH-ENERGY, HEAVY-ION MICROPROBE SYSTEM AND SINGLE HIT TECHNIQUE

Recent progress on high energy, heavy ion microprobes, the single-ion hit technique and the application plan of microbeams in the Japan Atomic Research Institute, Takasaki, is outlined. A heavy-ion microprobe connected to a 3 MeV tandem accelerator has been developed to study single-event upsets and the charge collection in integrated circuits. It is required in this study that a single ion strikes a precisely selected location which has not been struck by previous ions. The designed value of the focused beam spot size, 1 mum, has been achieved so far, and the technique of beam positioning and single ion hit are under development. Applications of higher-energy heavy ions are also discussed.